Measurement Science for “More-Than-Moore ” Technology Reliability Assessments

views expressed in this paper are those of the authors and of others whom attribution is given and are not necessarily those of NIST nor of any of the institutions cited therein. Certain commercial equipment, instruments, or materials are identified in this paper to specify experimental or theoretical procedures. Such identification does not imply recommendation by NIST nor the authors, nor does it imply that the equipment or materials are necessarily the best available for the intended purpose. In this paper, we will present an overview of metrology issues and some of the techniques currently under development in our group at NIST, aimed at understanding some of the potential performance limiting issues in such highly integrated systems. We will discuss our attempts to identify and characterize the various types of defects and relate them to where and why they form, without interrupting the responsible phenomena.